Design of an efficient Tunable Dual narrow-band MEMS Mid and Far IR emitter with Me-NTA for Industrial and Biomedical applications

Abstract

Spectrally selective infrared (IR) thermal emitters are gaining much attention now-a-days for sensing, spectroscopy and biomedical applications. In this research, two metasurface incorporated IR emitters are proposed and numerically analyzed using finite element method (FEM). First structure comprises a NiCr heater integrated with a NiCr-based metallic nanotube array (Me-NTA) metasurface to produce a single-narrowband emission in the mid-infrared (MIR) region. Furthermore, an Au-based Me-NTA metasurface on a NiCr-Au hybrid heater subsequently produces dual-narrowband emission in the short-and far-infrared (SIR and FIR) spectrums. Function of these emitters can be explained by Joule heating with the help of DC bias and consequently uniform temperature distribution can be observed along the active region. Simulation analysis shows that NiCr-metasurface based emitter produces single narrow-band near perfect emission centered at 4.5 μm in MIR region at an operating temperature of 700 K with maximum in-band conversion efficiency (CE) of 32.3% and radiated power of 199 mW. On the other hand, Au-metasurface based emitter generates dual-narrowband emission peaking at 2.5 μm and 10 μm, correlating to SIR and FIR subsequently, achieving maximum emission of 93% and 85%, respectively. The in-band CE for this emitter attains 10.4% and 4.4% in the first and second bands, associated with radiated powers of 350 mW and 147 mW, accordingly. Furthermore, execution of the emitter at 500 K reveals FIR emission with reduced power consumption. These results substantiate the possibilities of the suggested emitters in various industrial and biomedical applications.