Direct experimental measurement of ion properties in extreme plasma condition

Abstract

We have demonstrated Laser Induced Fluorescence (LIF) in a Capacitively Coupled Plasma (CCP) discharge to directly measure the most crucial ion properties at a discharge regime suitable for a broad range of plasma research related to plasma processing and dusty plasma investigations that has been impossible for many years. The ion flow measurements in the presence and absence of dust particles show that ions move much faster directionally than expected from thermal motion, with reductions observed in the presence of dust particles. Ion temperatures are also found to exceed room temperature, contrary to a common assumption in the dusty plasma community. These findings represent a significant advancement in experimental plasma research, providing vital information to refine ion-driven process models with insights that span multiple research fields.