Valley Engineering in Bilayer WSe$_2$ Gate-All-Around Transistors

Abstract

In bilayer WSe$_2$, interlayer coupling reduces the K--$Γ$ valley splitting to $Δ_{KΓ} \approx k_BT$ at room temperature, placing two hole-transport channels of markedly different effective mass in near-thermal equilibrium. We combine density functional theory (DFT) with spin--orbit coupling and an analytical two-valley device model to quantify how this near-degeneracy governs hole transport in gate-all-around (GAA) field-effect transistors. Three main results are obtained: (i)~the subthreshold swing is protected near $60$~mV~dec$^{-1}$ by quantum-capacitance screening independently of layer number; (ii)~the effective mobility is set by the K-to-$Γ$ valley occupation ratio and decreases monotonically with layer number; and (iii)~in the bilayer, compressive biaxial strain \emph{simultaneously} enhances the on-current, suppresses the off-current, and improves the on/off ratio from ${\approx}69$ to ${\approx}156$, while the subthreshold swing remains near the thermionic limit. This decoupling of on-state performance from switching slope is inaccessible through conventional mobility engineering and establishes a concrete design principle: \emph{valley-engineering sensitivity is maximized when $Δ_{KΓ} \approx k_BT$}, the condition most naturally satisfied by bilayer WSe$_2$ at room temperature and zero strain, making it the optimal channel for valley-engineered GAA transistors.